Combined near field optical and atomic force microscope
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This instrumentation oriented FOM-BR project started in 1993 and will be
concluded with a PhD thesis on 19th June 1997.
An integrated NSOM/AFM probe, which exists of an 200µm long flexible
cantilever with at its end a 5*m high conical tip, has been realised in the
clean room facility of the MESA research institute using standard
micro-mechanical techniques like wet and dry etching, photolithography and
CVD methods on a 3" Si-wafer. Furthermore a combined NSOM/AFM set-up (both
transmission and reflection) has been built based on a static light path and
probe and a scanning sample stage. The shape of the probe (cantilever
flexibility and tip shape) is suitable for use in AFM applications. Most
effort is put in the deposition of an opaque layer surrounding the tip in
order to get a sub-micron aperture at the tip end. Aluminium has been chosen
as coating material because of its high extinction coefficient and well known
depositing characteristics. Because of tip shape and oxidation properties of
the Aluminium other coating materials have been tried also. The optical
resolution found so far, ~ 300 nm, is not yet competitive with optimised
aperture type fibre probes.
Shear force detection using a quartz crystal tuning fork has been implemented
to provide higher topographic sensitivity, lower force interaction, reduced
optical background signal and liquid operation. This shear force feedback
system is used as distance control mechanism for a near-field scanning
optical microscope, in which a tapered optical fibre attached to the tuning
fork is scanned over the sample surface. The dynamics of a tuning fork
shear-force feedback system have been investigated in detail. Experiments
were performed measuring amplitude and phase of the tuning fork oscillation
as a function of driving frequency and tip-sample distance. These experiments
reveal that the resonance frequency of the tuning fork changes upon
approaching the sample. Either amplitude or phase of the tuning fork can be
used as distance control parameter in the feedback system. Using amplitude a
second-order behaviour is observed while with phase only a first-order
behaviour is observed. Numerical calculations confirm these observations.
This first-order behaviour results in an improved stability of our feedback
system. As an example a sample consisting of DNA strands on mica was imaged
which showed a height of the DNA of 1.4 nm. |
Articles
The following articles have been published regarding this project:
Atomic steps with tuning-fork-based noncontact atomic force microscopy
(abstract) (full pdf)Rensen WHJ, van Hulst NF, Ruiter AGT, West PE
APPLIED PHYSICS LETTERS
vol 75 issue 11: p1640-p1642 SEP 13 1999
Tuning fork shear-force feedback
(abstract) (full pdf)Ruiter AGT, van der Werf KO, Veerman JA, Garcia-Parajo MF, Rensen WHJ, van Hulst NF
ULTRAMICROSCOPY
vol 71 issue 1-4: p149-p157 MAR 1998
Single molecule rotational and translational diffusion observed by near-field scanning optical microscopy
(abstract) Ruiter AGT, Veerman JA, GarciaParajo MF, vanHulst NF
JOURNAL OF PHYSICAL CHEMISTRY A
vol 101 issue 40: p7318-p7323 OCT 2 1997
Dynamic behavior of tuning fork shear-force feedback
(abstract) (full pdf)Ruiter AGT, Veerman JA, vanderWerf KO, vanHulst NF
APPLIED PHYSICS LETTERS
vol 71 issue 1: p28-p30 JUL 7 1997
Microfabrication of near-field optical probes
(abstract) Ruiter AGT, Moers MHP, vanHulst NF, deBoer M
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
vol 14 issue 2: p597-p601 MAR-APR 1996
Development of an integrated NSOM probe
(abstract) (full pdf)Ruiter AGT, Moers MHP, Jalocha A, vanHulst NF
ULTRAMICROSCOPY
vol 61 issue 1-4: p139-p143 DEC 1995